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Service is our Priority

We are committed to our client's success as our own top metric


Supporting Semi Lithography Excimer Lasers Since 2005

ELRC saves customers money on parts and services for their Excimer Lasers. Used by over 100 fabs around the world.


Training and Support

Have a question; Free phone tech support. Parts ship within a day – without any contracts, lead times or expedite fees.

Training Information

About Us

Founded in 2005, Excimer Laser Repair Corporation offers excimer laser technology, parts and services.

ELRC saves semiconductor manufacturers on laser operating costs by offering our customers parts built and tested to OEM specifications couple with responsive services and free technical support.

Our Focus

We understand your requirements and provide quality work.


ELRC supports all modules, coupled with installation and technical support for Cymer® series 5000, 6000, 7000 and XLA 100 lasers.


On-site at ELRC headquarters in Escondido or at a customer location.


– 1-day turnaround on quotes
– Most parts shipped next day
– On-site installation
– Service engineers on-call, at your site next day


We provide our customers with a free laser monitoring service that alerts you if there is an issue in addition to providing performance and analytical data in an easy-to-use laser monitoring web app.

Get in Touch

Here for you

Call us anytime. We are here for your support.

Phone & Fax


Where to find us

2285 Micro Place Suite C
Escondido, CA 92029

Keep in touch
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