ELRC is your source for Cymer® excimer laser consumable and non-consumable modules. We qualify, repair and refurbish modules at our Escondido facility to OEM specification. We provide a warranty for all modules. ELRC offers installation, support services and technical support for all products.
Consumable Modules
ELRC consumable modules coupled with customer service provide significant savings to our customers.
- Support for 5000/6000/7000/XLA100/700 series
- Discharge Chambers
- Line Narrowing Modules (LNM)
- Wavelength Stabilization Modules (WSM)
- F2 Traps
- Output Couplers
ELRC supports all Cymer® excimer laser modules including:
- Control Modules
- Printed Circuit Boards
- High Voltage Power Supplies
- Commutation Modules
- Compression Heads
- High Voltage Cables
- Gas Modules
- Cooling Modules
- Other miscellaneous parts
ELRC Provides Full Support for the Following Cymer® Excimer Laser Systems
- 5000 Series
- 6000 Series
- 7000 Series
- XLA-100/700 Series
**Excimer Laser Repair Corporation is not affiliated or in any way associated with Cymer® Inc.