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Excimer Laser Parts

ELRC is your source for Cymer® excimer laser consumable and non-consumable modules. We qualify, repair and refurbish modules at our Escondido facility to OEM specification. We provide a warranty for all modules. ELRC offers installation, support services and technical support for all products.

Consumable Modules

ELRC consumable modules coupled with customer service provide significant savings to our customers.

  • Support for 5000/6000/7000/XLA100/700 series
  • Discharge Chambers
  • Line Narrowing Modules (LNM)
  • Wavelength Stabilization Modules (WSM)
  • F2 Traps
  • Output Couplers

ELRC supports all Cymer® excimer laser modules including:

  • Control Modules
  • Printed Circuit Boards
  • High Voltage Power Supplies
  • Commutation Modules
  • Compression Heads
  • High Voltage Cables
  • Gas Modules
  • Cooling Modules
  • Other miscellaneous parts

ELRC Provides Full Support for the Following Cymer® Excimer Laser Systems

  • 5000 Series
  • 6000 Series
  • 7000 Series
  • XLA-100/700 Series

**Excimer Laser Repair Corporation is not affiliated or in any way associated with Cymer® Inc.