ELRC has developed proprietary automated software that works in conjunction with the tools below to help maintain your Excimer Lasers. The software can update the laser as needed for power calibrations and pressure transducer calibrations.
Coarse Beam Alignment Tool (CBAT)
The Coarse Beam Alignment Tool allows users to visually observe initial beam quality and alignment in the horizontal and vertical plane.
Quantitative Beam Imaging Tool (QBIT)
The QBIT allows the customer engineers to directly image the laser beam to ensure optimal alignment.
Portable Pressure Measurement Device (PPMD)
The PPMD provides calibration to the pressure transducer. The correct gas mix is determined, enabling optimal performance.
Power Meter Calibration Tool (PMCT)
The power meter calibration tool calibrates output power to ensure the system provides the required amount of energy. ELRC has developed a easy-to-use software program to automatically update the laser system.
