CYMER® EXCIMER LASER SPARE PARTS
ELRC sells repaired and refurbished Cymer® excimer laser consumable and non-consumable modules. We test and qualify all repaired and refurbished modules at our Escondido facility before shipment to customers. ELRC provides a warranty for all modules in order to guarantee performance. We also offer our customers installation services for all modules.
Consumable Modules
Consumable modules represent the largest expense in operating a Cymer® excimer laser. Our consumable modules and excellent customer service provide significant savings to our customers.
Non-Consumable Modules
While non-consumable modules require replacement far less frequently than consumable modules, ELRC repairs and refurbishes these modules as well, and we maintain a stock of tested and qualified units for additional customer support.
ELRC PROVIDES FULL SUPPORT FOR THE FOLLOWING CYMER® EXCIMER LASER SYSTEMS
5000 Series
6000 Series
7000 Series
XLA/XLR Series (Future)
CONSUMABLE MODULES
Discharge Chambers
Line Narrowing Modules (LNM)
Wavelength Stabilization Modules (WSM)
F2 Traps
Output Couplers
NON-CONSUMABLE MODULES
Control Modules
Printed Circuit Boards
High Voltage Power Supplies
Commutation Modules
Compression Heads
High Voltage Cables
Gas Modules
Cooling Modules
Other miscellaneous parts