Consumable modules represent the largest expense in operating Excimer Lasers. Our consumable modules and excellent customer service provide significant savings to our customers.
While non-consumable modules require replacement far less frequently than consumable modules, ELRC repairs and refurbishes these modules as well, and we maintain a stock of tested and qualified units for additional customer support.
ELRC PROVIDES FULL SUPPORT FOR THE FOLLOWING CYMER® EXCIMER LASER SYSTEMS
5000 Series
6000 Series
7000 Series
XLA-100 Series
CONSUMABLE MODULES
Discharge Chambers
Line Narrowing Modules (LNM)
Wavelength Stabilization Modules (WSM)
F2 Traps
Output Couplers
NON-CONSUMABLE MODULES
Control Modules
Printed Circuit Boards
High Voltage Power Supplies
Commutation Modules
Compression Heads
High Voltage Cables
Gas Modules
Cooling Modules
Other miscellaneous parts
**Excimer Laser Repair Corporation is not affiliated or in any way associated with Cymer® Inc.