Consumable modules represent the largest expense in operating a Cymer® excimer laser. Our consumable modules and excellent customer service provide significant savings to our customers.
While non-consumable modules require replacement far less frequently than consumable modules, ELRC repairs and refurbishes these modules as well, and we maintain a stock of tested and qualified units for additional customer support.
ELRC PROVIDES FULL SUPPORT FOR THE FOLLOWING CYMER« EXCIMER LASER SYSTEMS
XLA/XLR Series (Future)
Line Narrowing Modules (LNM)
Wavelength Stabilization Modules (WSM)
Printed Circuit Boards
High Voltage Power Supplies
High Voltage Cables
Other miscellaneous parts