EXCIMER LASER SPARE PARTS
ELRC sells repaired and refurbished Cymer® excimer laser consumable and non-consumable modules. We test and qualify all repaired and refurbished modules at our Escondido facility before shipment to customers. ELRC provides a warranty for all modules in order to guarantee performance. We also offer our customers installation services for all modules.
Consumable Modules
Consumable modules represent the largest expense in operating Excimer Lasers. Our consumable modules and excellent customer service provide significant savings to our customers.
Non-Consumable Modules
While non-consumable modules require replacement far less frequently than consumable modules, ELRC repairs and refurbishes these modules as well, and we maintain a stock of tested and qualified units for additional customer support.
ELRC PROVIDES FULL SUPPORT FOR THE FOLLOWING CYMER® EXCIMER LASER SYSTEMS
5000 Series
6000 Series
7000 Series
XLA-100 Series
CONSUMABLE MODULES
Discharge Chambers
Line Narrowing Modules (LNM)
Wavelength Stabilization Modules (WSM)
F2 Traps
Output Couplers
NON-CONSUMABLE MODULES
Control Modules
Printed Circuit Boards
High Voltage Power Supplies
Commutation Modules
Compression Heads
High Voltage Cables
Gas Modules
Cooling Modules
Other miscellaneous parts