Spare Part Image

EXCIMER LASER SPARE PARTS

ELRC sells repaired and refurbished Cymer® excimer laser consumable and non-consumable modules. We test and qualify all repaired and refurbished modules at our Escondido facility before shipment to customers. ELRC provides a warranty for all modules in order to guarantee performance. We also offer our customers installation services for all modules.

Consumable Modules

Consumable modules represent the largest expense in operating Excimer Lasers. Our consumable modules and excellent customer service provide significant savings to our customers.

Non-Consumable Modules

While non-consumable modules require replacement far less frequently than consumable modules, ELRC repairs and refurbishes these modules as well, and we maintain a stock of tested and qualified units for additional customer support.

ELRC PROVIDES FULL SUPPORT FOR THE FOLLOWING CYMER® EXCIMER LASER SYSTEMS

5000 Series

6000 Series

7000 Series

XLA-100 Series

CONSUMABLE MODULES

Discharge Chambers

Line Narrowing Modules (LNM)

Wavelength Stabilization Modules (WSM)

F2 Traps

Output Couplers

NON-CONSUMABLE MODULES

Control Modules

Printed Circuit Boards

High Voltage Power Supplies

Commutation Modules

Compression Heads

High Voltage Cables

Gas Modules

Cooling Modules

Other miscellaneous parts