CYMER® EXCIMER LASER MONITORING SOFTWARE
ELRC has developed proprietary software that monitors Cymer excimer laser performance at customer sites. The software will not only store Cymer excimer laser performance data at regular intervals, but it will also use the data to chart parameters, track performance, plot trends, schedule preventative maintenance, etc. In addition, ELRCís customers find this software to be very useful in detecting early warning signs of future laser performance problems, which allows them to proactively schedule preventative and corrective maintenance and reduce unscheduled downtime.
The performance matrix page allows users to view the general status of their entire laser installed base on one page.
The diagnostic configuration page allows users to easily view each laser's diagnostics, configurables, errors, and warnings.
The trending function allows customers to compare one or more laser parameters on multiple lasers over a designated period of time.