Spare Part Image

ELRC service and support for Coherent XeCl Lasers.

ELRC’s rebuild services on Coherent:

  • Steel 1000/670
  • SX 315C
  • SX 540C
Includes fully refurbished optical modules, LDUs and technical support.

Coherent Laser

ERLC also supplies:

  • Output Couplers
  • chamber windows
  • HR (high reflector) mirrors
  • Other components as needed such as rebuilt pumps, reactive gas traps and motors.

Coherent Laser


**Excimer Laser Repair Corporation is not affiliated or in any way associated with Coherent Inc.